JPS6367236U - - Google Patents
Info
- Publication number
- JPS6367236U JPS6367236U JP16103286U JP16103286U JPS6367236U JP S6367236 U JPS6367236 U JP S6367236U JP 16103286 U JP16103286 U JP 16103286U JP 16103286 U JP16103286 U JP 16103286U JP S6367236 U JPS6367236 U JP S6367236U
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- gas
- gas introduction
- manufacturing process
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16103286U JPS6367236U (en]) | 1986-10-21 | 1986-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16103286U JPS6367236U (en]) | 1986-10-21 | 1986-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6367236U true JPS6367236U (en]) | 1988-05-06 |
Family
ID=31086973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16103286U Pending JPS6367236U (en]) | 1986-10-21 | 1986-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6367236U (en]) |
-
1986
- 1986-10-21 JP JP16103286U patent/JPS6367236U/ja active Pending
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